期刊
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
卷 54, 期 9, 页码 1873-1881出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TUFFC.2007.471
关键词
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This paper presents results and investigations of several new, man-made piezoelectric: single crystal, Czochralski-grown substrate materials for surface acoustic waves (SAW) applications. These materials, langanite (LGN), langatate (LGT), Sr3TaGa3Si2O14 (STGS), Sr3NbGa3Si2O14 (SNGS), Ca3TaGa3Si2O14 (CTGS), and Ca3NbGa3Si2O14 (CNGS), have the same structure as langasite (LGS) and are of the, same crystal class as quartz. These compounds are denser than quartz, resulting in lower phase velocities. They also have higher coupling. Unlike quartz and lithium niobate, there is no degradation of material properties below the material melting, points resulting in the possibility of extreme high-temperature operation (> 1000 degrees C). This paper gives a summary of extracted SAW material parameters for various propagation angles on Y-cut substrates of the six materials. Parameters included are electromechanical coupling, phase velocity, transducer capacitance, metal strip reflectivity, and temperature coefficient of frequency. Using previously published fundamental material constants, extracted parameters are compared with predictions for LGT and LGN. In addition, power flow angle and fractional frequency curvature data are reported for propagation angles on CTGS and CNGS Y-cut substrates that exhibit temperature compensation near room temperature. Detailed descriptions of the SAW parameter extraction techniques are given. A discussion of the results is provided, including a comparison of extracted parameters and an overview of possible SAW applications.
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