期刊
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
卷 316, 期 2, 页码 E233-E237出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jmmm.2007.02.098
关键词
integrated inductors; power supply on chip
This paper discusses the technologies required to produce magnetics on silicon for power supply on chip. Prototypes of micro-inductors have been fabricated using techniques such as thick copper coil deposition and improved magnetic materials. The measured maximum Q factor and inductance value are 5 at 2.5 MHz and 38 nH/mm(2), respectively. The impact of seed layers and core overlap has been identified to be significant at high frequencies. Using the validated analytical model, the electrical performance of micro-inductors in a buck converter can be predicted and efficiency of 85.9 with a power density of 15.8 W/cm(2) can be achieved. (c) 2007 Elsevier B.V. All rights reserved.
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