3.8 Article

Thermal conductivity measurements of Sb-Te alloy thin films using a nanosecond thermoreflectance measurement system

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INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.46.6863

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optical disks; phase-change memory; Sb-Te alloys; thermal conductivity; thermoreflectance

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Using a nanosecond thermoreflectance measurement system, which enables the measurement of the thermal conductivity of nanometer-scale thin films, we have measured the thermal conductivities of Sb2Te, Sb2Te3, SbTe9, Sb, and Te thin films at room temperature. We clarified that the thermal conductivities of Sb-Te alloys depend on the Sb and Te atomic ratios. A large change in thermal conductivity was observed in the vicinity of the composition ratio of Sb2Te3. We proposed that this large change may be attributable to the formation of an Sb atomic network in the crystalline structure of the Sb-Te alloy.

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