期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 16, 期 5, 页码 1113-1119出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2007.900884
关键词
optimization methods; phonons; superlattice; thermoelectric (TE) devices
The performance of thermoelectric (TE) coolers is determined by the figure of merit of the TE materials ZT. In order to obtain the optimal performance of a superlattice microcooler, both the superlattice structure and the device were optimized in the design and the fabrication process. The thermal conductivities of InGaAs/InGaAsP superlattices with different periodic lengths were measured with the 3 omega method. The result indicates that the superlattice at a certain periodic length has minimal thermal conductivity, which, in general, corresponds to an enhanced ZT. A 1-D model was utilized to investigate the significant parameters in microcoolers. Based on the modeling results, a set of superlattice microcoolers were fabricated. The maximum cooling temperature that was reached is 0.76 degrees C for the optimized cooler at room temperature.
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