期刊
THIN SOLID FILMS
卷 515, 期 24, 页码 8534-8538出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2007.03.118
关键词
transparent conducting oxide; inkjet printing; thin film; laser processing; excimer laser; displays; flexible substrates; conductivity
The feasibility of low-temperature fabrication of transparent electrode elements from thin films of antimony-doped tin oxide (SnO2:Sb, ATO) has been investigated via inkjet printing, rf magnetron sputtering and post-deposition excimer laser processing. Laser processing of thin films on both glass and plastic substrates was performed using a Lambda Physik 305i excimer laser, with fluences in the range 20-100 mJ cm(-2) reducing sheet resistance from as-deposited values by up to 3 orders of magnitude. This is consistent with TEM analysis of the films that shows a densification of the upper 200 nm of laser-processed regions. (c) 2007 Elsevier B.V. All rights reserved.
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