Growth and characterization of transparent Pb(Zi,Ti)O3 capacitor on glass substrate

(Pb)(Zr0.52Ti0.48)O-3 (PZT) films were fabricated on LaNiO3 (LNO)/In2O3 90%SnO(2)10% (ITO) layered transparent electrodes on glass substrates using chemical solution deposition. The structural, electrical, and optical properties of semitransparent Pd/PZT/LNO/ITO and transparent ITO/LNO/PZT/LNO/ITO capacitors fabricated on glass substrates were studied. X-ray diffraction revealed an improved crystalline structure of PZT on ITO-buffered glass substrates by interposing a LNO layer between PZT and ITO. Atomic force microscopy showed a smoother surface topography for the LNO/ITO layered electrode on glass, as compared to that of the single ITO layer on glass. The remnant polarization (P-r) of the Pd/PZT/LNO/ITO/glass capacitors and transparent ITO/LNO/PZT/LNO/ITO/glass capacitors was estimated from P-E hysteresis loops. The Pd/PZT/LNO/ITO capacitors on glass revealed significant improvement in the P-r as compared to PZT film based capacitors with ITO electrodes only. Excellent optical transmittance was observed for the whole capacitor structure. The importance of a high performance transparent capacitor is that this structure may enable high efficiency transparent electronic devices such as solar energy storage, photovoltaic, and intelligent windows, among others.