期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
卷 46, 期 11, 页码 7599-7601出版社
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.46.7599
关键词
cluster; SIMS; depth profiling; depth resolution; boron; silicon; ion beam; atomic mixing; decay length; Ir-4(CO)(12)
Tetrairidium dodecacarbonyl, lr(4)(CO)(12), is a massive compound called metal cluster complex, which has a molecular weight of 1104.9. Using an lr(4)(CO)(7)(+) primary ion beam, secondary ion mass spectrometry (SIMS) of boron-delta-doped silicon samples was performed. Depth resolution, defined by 1/e decay length for the trailing edge of the boron delta layer, was investigated in the beam energy ranging from 2.5 to 10keV at an incident angle of 45 degrees. Experimental results showed that the depth resolution improved with oxygen partial pressure at a beam energy of 5 keV. It was confirmed that the depth resolution without oxygen flooding monotonically improved as beam energy decreased. Furthermore, it was found that the favorable effect of oxygen flooding on depth resolution weakened as beam energy was reduced.
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