期刊
OPTICAL AND QUANTUM ELECTRONICS
卷 39, 期 14, 页码 1223-1229出版社
SPRINGER
DOI: 10.1007/s11082-008-9192-y
关键词
femtosecond laser; FOTURAN; micro-holes; microfabrication
Vertical micro-holes were fabricated inside a photosensitive glass (FOTURAN) by focused femtosecond laser (lambda = 775 nm) writing, followed by heat treatment and wet chemical etching in 8% hydrofluoric acid solution for 50 min. The micro-holes were analyzed by optical and scanning electron microscopy, and was found they own circular cross-section and clear edge. At present, micro-holes with aspect ratio of about 7 is achieved. By varying the incident laser fluence in a range of 2.3-36.2 J/cm(2) and the laser writing velocity in 100-1000 mu m/s, the influences of femtosecond laser parameters on the formation of micro-holes are characterized as that: writing velocities hardly affect the micro-hole diameter, while relatively lower laser fluences result in smaller diameter, and the cross-section is more circular in this case. The possible reason for this phenomenon is discussed.
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