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Digital holographic microscopy in the deep (193 nm) ultraviolet

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APPLIED OPTICS
卷 46, 期 32, 页码 7829-7835

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OPTICAL SOC AMER
DOI: 10.1364/AO.46.007829

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We present a system based on digital holography suitable for the investigation of microscopic objects. To increase the resolution of the system a deep (193 nm) UV laser source has been used. A method for compensating aberrations due to the nonperfect optical elements used for the recording has been developed. The system allows the investigation of reflecting and transmitting samples. (C) 2007 Optical Society of America.

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