4.6 Article Proceedings Paper

Excellent ferro electricity of thin poly(vinylidene fluoride-trifluoro ethylene) copolymer films and low voltage operation of capacitors and diodes

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IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TUFFC.2007.583

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Characteristics of metal-ferroelectrics-metal (MFM) capacitors and metal-ferroelectrics-insulator-semi-conductor (MFIS) diodes with poly(vinylidene fluoride-trifluoro ethylene) [P(VDF-TrFE)] copolymer films thinner than 100 nm were investigated. The films were prepared by spin-cast process and were annealed at 1401 degrees C in air for crystallization. The ferroelectric properties are equivalent to those of oxide ferroelectrics, even under low voltage or high frequency operation.

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