期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 17, 期 12, 页码 2491-2494出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/17/12/015
关键词
-
The detection limit of a resonant cantilever mass sensor depends on its quality factor. The size and mode dependences of quality factors in silicon micro-cantilevers at atmospheric pressure are extensively investigated. Silicon micro-cantilevers of various lengths and widths are fabricated and their quality factors of flexural vibration modes are measured in air. The quality factor is found to vary largely depending on the cantilever length, width and vibration mode. The maximum quality factor obtained is 1550. These findings correlate well with a vibrating sphere model with an equivalent cross-section approximation.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据