4.8 Article

Graphene transistors fabricated via transfer-printing in device active-areas on large wafer

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NANO LETTERS
卷 7, 期 12, 页码 3840-3844

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AMER CHEMICAL SOC
DOI: 10.1021/nl072566s

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  1. Directorate For Engineering
  2. Div Of Civil, Mechanical, & Manufact Inn [0826131] Funding Source: National Science Foundation

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We demonstrate a method that uses the pillars on a stamp to cut and exfoliate graphene islands from a graphite and then uses transfer printing to place the islands from the stamp into the device active-areas on a substrate with a placement accuracy potentially in nanometers. The process can be repeated to cover all device active-areas over an entire wafer. We also report the transistors fabricated from the printed graphene. The transistors show a hole and electron mobility of 3735 and 795 cm(2)/V-s, respectively, and a maximum drive-current of 1.7 mA/mu m (at V-DS = 1 V), which are among the highest reported for room temperature. The effects of various transferring and fixing layers on sticking graphenes to a stamp and to a substrate, respectively, were also investigated.

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