Nanostructured Dy2O3 films: An XPS Investigation

The present investigation is devoted to the X-ray photoelectron spectroscopy (XPS) analysis of the main core levels (C 1s, O 1s, Dy 4d, Dy 3d) of a representative dysprosium (III) oxide thin film. The specimen was grown on Si (100) at 500 degrees C by metal organic chemical vapor deposition (MOCVD) starting from Dy ((iPrN)(2)CNMe2)(3) in an N-2/O-2 atmosphere. The above route yielded uniform and homogeneous nanostructured Dy2O3 films characterized by a remarkable reactivity towards atmospheric CO2 and H2O, resulting in the surface co-presence of dysprosium carbonates/bicarbonates and hydroxides. The most relevant spectral features are presented and discussed. (C) 2006 American Vacuum Society.