期刊
ADVANCED MATERIALS
卷 19, 期 23, 页码 4248-+出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200701419
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Stimuli-responsive microactuators controlled by the interfacial stress across the polymer/silicon interface are introduced as simple, miniature, and flexible sensing platforms for chemical vapor detection. The sensors detect water vapor with sensitivities of 10 parts per billion (+/-0.00005% relative humidity) and faster than previously recorded response times. These characteristics make the bimaterial silicon cantilevers excellent candidates for critical security and defense needs as well as for environmental monitoring.
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