期刊
SURFACE SCIENCE REPORTS
卷 62, 期 12, 页码 499-525出版社
ELSEVIER
DOI: 10.1016/j.surfrep.2007.08.002
关键词
galvanic deposition; metalization; semiconductor surfaces; electrodeposition; electroless deposition
The deposition of metals on semiconductors encompasses a broad range of technologically important processes, with applications ranging from electronic devices to chemical sensors. Recent years have witnessed a surge of research activities in galvanic displacement processes on semiconductor substrates. After a brief review, of the fundamental aspects underlying galvanic displacement processes on semiconductor surfaces, this paper discusses applications to micro- and nanoscale devices, including schemes developed for the metallization and nanopatterning of semiconductor substrates with high selectivity and with optimal interfacial properties. (c) 2007 Elsevier B.V All rights reserved.
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