期刊
MICROCHIMICA ACTA
卷 161, 期 3-4, 页码 413-419出版社
SPRINGER WIEN
DOI: 10.1007/s00604-007-0854-4
关键词
X-ray spectroscopy; X-ray production yield; X-ray tube spectrum; X-ray fluorescence analysis; XRF; X-ray optics; scanning electron microscopy; analytical SEM
Energy dispersive and wavelength dispersive X-ray spectrometry are used to determine the composition of a specimen in a scanning electron microscope (SEM) by electron probe microanalysis (EPMA). A valuable completion for the SEM is analysis by X-ray fluorescence (XRFA). The main advantage of this method consists in its low detection limit. XRFA with a SEM uses the same spectrometers as for EPMA, necessary are only an additional X-ray source for the excitation of fluorescence spectra and software for their evaluation. Recent developments of smart low-power X-ray tubes and X-ray optical components enabled the construction of compact X-ray sources with focussing properties as add-on for a SEM. For quantitative XRFA the source spectrum has to be known. For its calculation the X-ray production yields Y have been measured for the commonly used tube target materials Mo, Rh and W. The excitation spectra were calculated for a variety of source types and compared with respect to the achievable photon flux and its spectral distribution.
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