期刊
ADVANCES IN POLYMER TECHNOLOGY
卷 32, 期 3, 页码 -出版社
WILEY-HINDAWI
DOI: 10.1002/adv.21358
关键词
Dielectric properties; Low-k; Macroporous polymer; Methods; Nanostructure
资金
- State Key Laboratory of Electrical Insulation and Power Equipment [EIPE12206]
- Chunhui Project from Education Ministry of China [Z2011078]
- Open Research Fund of Key Laboratory of Special Materials Preparation and Control, Xihua University [SZJJ2012-017]
- Specialized Research Project of the Education Department of Sichuan Province [12ZB130]
- Key Discipline Project of Xihua University [L2XW418-13-0]
Nanoporous or mesoporous structures and hence a decrease in dielectric constant can always be induced with the introduction of air into polymeric materials. It is therefore achievable to prepare ultra-large-scale integrated circuit (ULSIC) on ultralow dielectric constant (i.e., low-k) materials. The research on nano/mesoporous polymer based low-k materials, including the past decade advances, the introduction of principles and methods of nano/mesopores, characterization, commonly used raw materials, typical products, and corresponding dielectric properties, is extensively reviewed and summarized in this paper. The nano/mesopores can be introduced into the polymers by more than five methods such as reprecipitation, sol-gel, thermolysis, supercritical foaming, and electrochemical etch. The pore size, morphologies, porosities, and film thicknesses of the products can be controlled by raw materials and processing conditions in these methods. The low-k dielectric materials based on nano/mesoporous polymers have great potential application in ULSIC in light of their special dielectric, optical, thermal, and mechanical properties. (C) 2013 Wiley Periodicals, Inc.
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