期刊
ADVANCED MATERIALS
卷 26, 期 25, 页码 4386-4396出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201400386
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资金
- NSF [CMMI-1234169]
- SRC
- Tokyo Electron
- TSMC
- C-SPIN Center
- MARCO
- DARPA
- Global Research Network Program through the National Research Foundation of Korea (NRF) [NRF-2011-220-D00063]
- Center for Integrated Smart Sensors as Global Frontier Project - Korea government (MSIP) [2011-0031848]
- Direct For Mathematical & Physical Scien
- Division Of Materials Research [1007760] Funding Source: National Science Foundation
- Directorate For Engineering
- Div Of Civil, Mechanical, & Manufact Inn [1234169] Funding Source: National Science Foundation
- National Research Foundation of Korea [2011-0031848, 220-2011-1-D00063] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Thin films of block copolymers are widely seen as enablers for nanoscale fabrication of semiconductor devices, membranes, and other structures, taking advantage of microphase separation to produce well-organized nanostructures with periods of a few nm and above. However, the inherently three-dimensional structure of block copolymer microdomains could enable them to make 3D devices and structures directly, which could lead to efficient fabrication of complex heterogeneous structures. This article reviews recent progress in developing 3D nanofabrication processes based on block copolymers.
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