Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials

ADVANCED MATERIALS

卷 25, 期 44, 页码 6430-6435

WILEY-V C H VERLAG GMBH

vanadium dioxide; adaptative electronics; frequency tuning; Joule heating; mechanical resonators

Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter

1. FIRB RBAP115AYN
2. Fondazione CARIGE [PRIN 2010NR4MXA]
3. Japan Society for promotion of Science (JSPS) [25286058]
4. Ministry of Education, Culture, Sports, Science, and Technology (MEXT) [21676001]
5. Grants-in-Aid for Scientific Research [21676001, 25286058] Funding Source: KAKEN