相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。Advanced Organic Polymer for the Aggressive Scaling of Low-kMaterials
Marianna Pantouvaki et al.
JAPANESE JOURNAL OF APPLIED PHYSICS (2013)
New Polymers Derived from 4-Vinylsilylbenzocyclobutene Monomer with Good Thermal Stability, Excellent Film-Forming Property, and Low-Dielectric Constant
Junxiao Yang et al.
JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY (2011)
Low Dielectric Constant Materials
Willi Volksen et al.
CHEMICAL REVIEWS (2010)
Fluorinated high-performance polymers: Poly(arylene ether)s and aromatic polyimides containing trifluoromethyl groups
Mahua G. Dhara et al.
PROGRESS IN POLYMER SCIENCE (2010)
Cross-Linkable Molecular Glasses: Low Dielectric Constant Materials Patternable in Hydrofluoroethers
Eisuke Murotani et al.
ACS APPLIED MATERIALS & INTERFACES (2009)
Ultra Low-k Films Derived from Hyperbranched Polycarbosilanes (HBPCS)
Jitendra S. Rathore et al.
ADVANCED FUNCTIONAL MATERIALS (2008)
Ultra-low-k materials derived from poly(D, L-lactide-b-pentafluorostyrene) diblock copolymers
Tracy L. Bucholz et al.
JOURNAL OF MATERIALS CHEMISTRY (2008)
Zeolite-Inspired Low-k Dielectrics Overcoming Limitations of Zeolite Films
Salvador Eslava et al.
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY (2008)
Molecular network reinforcement of sol-gel glasses
Geraud Dubois et al.
ADVANCED MATERIALS (2007)
High-modulus spin-on organosilicate glasses for nanoporous applications
Hyun Wook Ro et al.
ADVANCED MATERIALS (2007)
Synthesis of a novel poly(binaphthylene ether) containing trifluoromethyl groups with a low dielectric constant
Kousuke Tsuchiya et al.
MACROMOLECULES (2006)
New high strength low-k spin-on thin films for IC application
YQ Huang et al.
MACROMOLECULES (2006)
Synthesis of poly(naphthylene ether) containing tetraphenylmethane group with a low dielectric constant
Kousuke Tsuchiya et al.
POLYMER JOURNAL (2006)
Ultralow-k nanoporous organosilicate dielectric films imprinted with dendritic spheres
BD Lee et al.
NATURE MATERIALS (2005)
Nanoporous ultra-low-dielectric-constant fluoropolymer films via selective UV decomposition of poly(pentafluorostyrene)-block-poly(methyl methacrylate) copolymers prepared using atom transfer radical polymerization
GD Fu et al.
ADVANCED FUNCTIONAL MATERIALS (2005)
Synthesis of a novel poly(binaphthylene ether) with a low dielectric constant
K Tsuchiya et al.
MACROMOLECULES (2004)
Molecular design of free volume as a route to low-κ dielectric materials
TM Long et al.
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY (2003)
Miscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications: Comparison of modulated differential scanning calorimetry and fluorescence spectroscopy
QR Huang et al.
MACROMOLECULES (2003)
A novel structural amorphous fluoropolymer film with an ultra-low dielectric constant
SJ Ding et al.
MATERIALS LETTERS (2001)
Low dielectric constant polymers for microelectronics
G Maier
PROGRESS IN POLYMER SCIENCE (2001)
Design of polyaromatic ethers using cyclopentadienyliron complexes
AS Abd-El-Aziz et al.
MACROMOLECULES (2000)
分享论文
