期刊
ADVANCED MATERIALS
卷 24, 期 31, 页码 4249-+出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201104895
关键词
block copolymers; hybrid patterns; templated self-assembly; graphoepitaxy; square patterns
类别
资金
- Semiconductor Research Corporation
- FENA Center
- NRI
- SMA
- National Science Foundation
- Taiwan Semiconductor Manufacturing Company
- Tokyo Electron
- NGS Singapore
Using an array of majority-block-functionalized posts makes it possible to locally control the self-assembly of a block copolymer and achieve several morphologies on a single substrate. A template consisting of a square symmetry array of posts produces a square-symmetry lattice of microdomains, which doubles the areal density of features.
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