期刊
ADVANCED MATERIALS
卷 23, 期 13, 页码 1567-1571出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201004095
关键词
-
类别
资金
- US National Science Foundation
- Singapore-MIT Alliance
- ILJU foundation
Templated formation of complex patterns via solid-state dewetting is demonstrated. Thin films often dewet from their substrates when they are heated, even while remaining in the solid state throughout the process. It is shown that solid-state dewetting of epitaxial films can be templated through lithographic pre-patterning, so as to reproducibly form complex structures with sub lithographic feature sizes.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据