期刊
ADVANCED MATERIALS
卷 22, 期 44, 页码 5035-+出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201002515
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- Federal German Agency of Science and Education (BMBF)
Black silicon with aspect ratios up to 10 and an average optical reflectance of only 2.5% over the whole absorbing spectral range is covered perfectly conformal with a transparent conductive oxide. The thin film is deposited by thermal atomic layer deposition (ALD) and exhibits a resistivity of 1.1 Omega cm. This concept promises a new design for an efficient heterojunction silicon solar cell.
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