Micrometer-Scale Cubic Unit Cell 3D Metamaterial Layers

Membrane projection lithography is used to create vertically oriented splitring resonators which show measured electric and magnetic resonances (lambda = 22, 11, and 7 mu m). We then create composite structures with 5 split ring resonators per unit cell (image). This approach provides a long-sought, manufacturable path toward the realization of 3D optical and infrared metamaterials.