期刊
ADVANCED MATERIALS
卷 22, 期 41, 页码 4605-4611出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201001199
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资金
- NSF [DMR-0806860]
- Penn State Materials Research Science and Engineering Center [NSF DMR-0820404]
- EPSRC [EP/G028273/1]
- NSF/EPSRC Materials World Network
- Royal Academy
- Engineering and Physical Sciences Research Council [EP/G028273/1, EP/G051755/1] Funding Source: researchfish
- EPSRC [EP/G028273/1, EP/G051755/1] Funding Source: UKRI
Near atomically smooth, void-free, centimeter-long amorphous silicon waveguides are produced by high pressure chemical fluid deposition in the pores of a microstructured optical fiber template (right inset). Semiconductor waveguides fabricated by conventional deposition/fabrication approaches have a surface roughness that is a constraining factor in most optoelectronic devices, but these waveguides conform to the extraordinarily geometrically perfect optical fiber pores (DIC image, bottom inset).
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