Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography

A new fabrication approach, self-aligned membrane projection lithography, is used to create composite split ring resonators with a resonance near 10 mu m. The composite resonators are oriented on the interior face of approximately-spheroidal cavities, and hence represent the first instance of fabrication of micrometer-scale SRRs with out-of-plane current flow.