期刊
ADVANCED MATERIALS
卷 21, 期 2, 页码 193-+出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200801959
关键词
-
类别
资金
- US Department of Energy (DOE)
- DOE EE-RE Solid State Lighting Program
- NSF/DMR Ceramic Program [NSF 0709831]
Epitaxial metal nitride films are prepared using a general chemical solution approach. A polymer-assisted deposition to prepare epitaxial cubic TiN, metastable AlN, and ternary nitride Ti1-xAlxN films is demonstrated. The structural, optical and electrical properties of the films are investigated, and may be of interest for many technological applications.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据