期刊
ADVANCED MATERIALS
卷 21, 期 40, 页码 4050-+出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200803243
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资金
- Information Display RD Center grant [F0004091]
- Ministry of Knowledge Economy, Republic of Korea
- KIEST [2008-10002-0067-0]
- kisT [2E20900]
A new and cost-effective replica fabrication method for transparent and hard molds used in imprinting lithography is presented. The process uses a polymer copy as a carrier. Replicated hard molds eliminate the need for direct contact between the master and the patterned polymer on the substrate, and thus reduce contamination of the master.
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