期刊
ADVANCED MATERIALS
卷 20, 期 24, 页码 4793-+出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200801460
关键词
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Sub-micrometer layers of single-crystal diamond suitable for subsequent processing are fabricated. The method employed is a significant enabling technology for nanomechanical and photonic structures incorporating color centers. The process uses a novel double-implant process, annealing, and chemical etching to produce membranes. The thinnest layers achieved to date are 210nm thick.
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