期刊
ADVANCED MATERIALS
卷 20, 期 9, 页码 1738-+出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200701021
关键词
-
Silicon nitride with helical structure was prepared on a large scale by CVD. On the microscale, these coiled Si3N4 ceramics still possess superelasticity and can recover their original shapes after cyclic loadings without noticeable deformations. These results suggest helical microcoils could have potential in microdevices for MEMS, motors, electromagnets, generators, and related equipment.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据