期刊
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES
卷 58, 期 2, 页码 297-301出版社
MAIK NAUKA/INTERPERIODICA/SPRINGER
DOI: 10.1134/S0020441215010303
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资金
- State Scientific and Technological Program Diamonds of the Republic of Belarus [3429/4.16]
Data on the deposition of thin wear-resistant diamond-like films (DLFs) and diamond films (DFs) are reported. Films are deposited using the chemical vapor deposition method with the application of a supersonic high-temperature plasma jet generated by a high-enthalpy plasmatron with a sectionalized interelectrode insert and a cold gas curtain of discharge chamber walls. The deposition rate for DLFs and DFs is as high as 30-50 mu m/h. The best results (the absence of the graphite phase in a film) are obtained at the highest degree of ionization of the supersonic plasma jet.
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