Atomic layer deposited titanium dioxide and its application in resonant waveguide grating

We demonstrate good optical quality TiO2 thin films grown by atomic layer deposition at 120 degrees C. The optical properties were studied using spectroscopic ellipsometry and prism coupling methods. The refractive index was 2.27, and the slab waveguide propagation loss was less than 1 dB/cm at 1.53 mu m. A high quality resonant waveguide grating was fabricated using a thin TiO2 layer on top of a SiO2 grating. (C) 2010 Optical Society of America