4.5 Article

Laser direct-write technique for fabricating microlens arrays on soda-lime glass with a Nd:YVO4 laser

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APPLIED OPTICS
卷 49, 期 26, 页码 4979-4983

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OPTICAL SOC AMER
DOI: 10.1364/AO.49.004979

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  1. Xunta de Galicia, Spain [INCITE08PXIB206013PR]
  2. Marie Curie Early Stage Training Grant [MC 2005 020353-2]

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A one-step direct-write technique for fabricating spherical microlenses on soda-lime glass substrates is described. Using a Q switched Nd:YVO4 laser combined with a galvanometer system, square and triangular microlens arrays were fabricated. The focal length of microlenses is measured using direct and nondirect methods. Values around 118 and 125 mu m were obtained for the microlens focal length of square and triangular arrays, respectively. A noncontact profilometer is used for determining the surface roughness of square and triangular arrays. Results are compared with that of glass substrate. (C) 2010 Optical Society of America

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