期刊
ACTA MATERIALIA
卷 79, 期 -, 页码 138-145出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.actamat.2014.07.014
关键词
Transmission electron microscopy (TEM); Crystallographic orientation; Nanocrystalline aluminum; Grain size; Thin film
资金
- SRC Tasks [1292.008, 2121.001, 2323.001]
- MRSEC program of the NSF [DMR-0520425]
Crystal orientation maps of a nanocrystalline Al film were obtained using precession electron diffraction in a transmission electron microscope. The orientation maps were then subjected to a series of well-defined clean-up procedures for removal of badly indexed points and pseudosymmetry boundaries. The mean grain size and grain size distribution were obtained from the reconstructed boundary network. The grain size and grain size distribution were also measured by the conventional transmission electron microscopy brightfield-imaging-based hand-tracing methodology, and were compared quantitatively with the orientation mapping results. It was found that the mean grain size from the two methodologies agree within experimental error. On the other hand, the orientation mapping methodology produced a somewhat different grain size distribution compared with the distribution obtained by the hand-tracing methodology. The reasons for the differences in the distributions are discussed. (C) 2014 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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