4.7 Article

High strength, epitaxial nanotwinned Ag films

期刊

ACTA MATERIALIA
卷 59, 期 1, 页码 93-101

出版社

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.actamat.2010.09.011

关键词

Epitaxial growth; Nanoindentation; Nano scale twins; Sputtering; Transmission electron microscopy (TEM)

资金

  1. NSF-DMR [0644835]

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Epitaxial silver films with (1 1 1) and (1 1 0) orientations were deposited by magnetron sputtering onto silicon (1 1 1) and (1 1 0) sub strates, respectively High density growth twins with an average spacing of a few nanometers are observed in the (1 1 1) oriented films, with twin boundaries oriented normal to the growth direction Twins are observed in the (1 1 0) oriented films with a much lower twin density, and the twin boundaries are oriented 60 degrees from the growth direction The epitaxial nanotwinned Ag (1 1 1) and (1 1 0) films have respective indentation hardness values of similar to 2 and 1 GPa The influences of deposition parameters, stacking fault energy, and orientation of {1 1 1} planes on the formation of nanotwins are discussed (C) 2010 Acta Materialia Inc Published by Elsevier Ltd All rights reserved

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