期刊
ACTA MATERIALIA
卷 59, 期 16, 页码 6287-6296出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.actamat.2011.06.039
关键词
TiAlN; Nanocrystalline materials; X-ray absorption near-edge structure; Resonant inelastic X-ray scattering
资金
- Spanish MICINN [MAT2007-66719-C03-03, FIS2009-12964-C05-04, CSD2008-00023]
- Spanish Ministerio de Educacion y Ciencia (MEC)
- Wenner-Gren Foundations
- SSF
- NSERC
- NRC
- CIHR
- University of Saskatchewan
- EC [R II 3-CT-2004-506008]
- Office of Science, Office of Basic Energy Sciences of the U.S. Department of Energy [DE-AC02-05CH11231]
Thermal treatment of supersaturated Ti(1-x)Al(x)N films (x approximate to 0.67) with a dominant ternary cubic-phase were performed in the 700-1000 degrees C range. Grazing incidence X-ray diffraction (GIXRD) shows that, for annealing temperatures up to 800 degrees C, the film structure undergoes the formation of coherent cubic AlN (c-AlN) and TiN (c-TiN) nanocrystallites via spinodal decomposition and, at higher temperatures (>= 900 degrees C), GIXRD shows that the c-AlN phase transforms into the thermodynamically more stable hexagonal AIN (h-AlN). X-ray absorption near-edge structure (XANES) at the Ti K-edge is consistent with spinodal decomposition taking place at 800 degrees C, while Al K-edge and N K-edge XANES and X-ray emission data show the nucleation of the h-AlN phase at temperatures >800 degrees C, in agreement with the two-step decomposition process for rock-salt structured TiAlN, which was also supported by X-ray diffraction patterns and first-principle calculations. Further, the resonant inelastic X-ray scattering technique near the N K-edge revealed that N(2) is formed as a consequence of the phase transformation process. (C) 2011 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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