期刊
ACTA MATERIALIA
卷 59, 期 1, 页码 386-399出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.actamat.2010.09.045
关键词
Ni-W; Thin film; LIGA; Thermal treatment; Texture
Ni-W alloys are promising materials for applications where mechanical stability at relatively high temperature is required Several Ni-W thin film gradients were synthesized by magnetron sputtering spanning the entire binary composition range Microstructure and phase composition were characterized by means of X-ray diffraction and transmission electron microscopy, while the mechanical properties were assessed using nanoindentation As-deposited films exhibit non-equilibrium phases such as amorphous phases in the center of the phase diagram and beta-tungsten in the tungsten-rich regime After annealing, a new X-phase is observed in the center of the phase diagram and non-equilibrium phase compositions are observed for most compositions, such as the presence of alpha-tungsten at a composition of 75% Ni Microstructure and composition were successfully correlated to the mechanical properties (C) 2010 Acta Materialia Inc Published by Elsevier Ltd All rights reserved
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