Size-effect on stress behavior of the AlN/TiN film

The stress behavior of AlN/TiN superlattice film has been studied by means of a crystal-chemical atomic dynamics simulation based oil first-principles calculations. The size-effects oil stress behavior are demonstrated and discussed in detail. Stress behavior depends not only oil AlN thickness but also On structural relaxation and strain distribution in the film. When the AlN thickness exceeds a critical one. the superlattice film is metastable. Stress behavior can be traced to the AlN/TiN interface structure and its variation with strain relaxation.) which may reflect the main strain characteristics caused by AlN structural transformation in this film. (C) 2009 Acta Materialia Inc. Published by elsevier Ltd. All rights reserved.