期刊
ACS NANO
卷 8, 期 6, 页码 6145-6150出版社
AMER CHEMICAL SOC
DOI: 10.1021/nn501563j
关键词
oxide nanosheets; lateral solid-phase epitaxy; thin film; transparent conducting electrode; TiO2; perovskite
类别
资金
- Ministry of Education, Culture, Sports, Science and Technology (MEXT)
- World Premier International Center Initiative (WPI) on Materials Nanoarchitectonics, MEXT
We developed a technique to fabricate oxide thin films with uniaxially controlled crystallographic orientation and lateral size of more than micrometers on amorphous substrates. This technique is lateral solid-phase epitaxy, where epitaxial crystallization of amorphous precursor is seeded with ultrathin oxide nanosheets sparsely (approximate to 10% coverage) deposited on the substrate. Transparent conducting Nb-doped anatase TiO2 thin films were fabricated on glass substrates by this technique. Perfect (001) orientation and large grains with lateral sizes up to 10 mu m were confirmed by X-ray diffraction, atomic force microscopy, and electron beam backscattering diffraction measurements. As a consequence of these features, the obtained film exhibited excellent electrical transport properties comparable to those of epitaxial thin films on single-crystalline substrates. This technique is a versatile method for fabricating high-quality oxide thin films other than anatase TiO2 and would increase the possible applications of oxide-based thin film devices.
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