期刊
ACS NANO
卷 7, 期 6, 页码 5291-5299出版社
AMER CHEMICAL SOC
DOI: 10.1021/nn401094s
关键词
directed self assembly; block copolymer; roll to roll; zone annealing
类别
资金
- National Science Foundation (NSF), Division of Materials Research (DMR), Collaborative Grant NSF [DMR-1006421]
- U.S. Department of Energy, Office of Basic Energy Sciences [DE-AC02-98CH10886]
- Third Frontier Program of State of Ohio
- Direct For Mathematical & Physical Scien
- Division Of Materials Research [1006449] Funding Source: National Science Foundation
Large-scale roll-to-roll (R2R) fabrication of vertically oriented nanostructures via directed self-assembly of cylindrical block copolymer (c-BCP) thin films is reported. Nearly 100% vertical orientation of cylinders in sub-100 nm c-BCP films under optimized processing via a dynamic sharp temperature gradient field termed Cold Zone Annealing-Sharp or 'CZA-S' is achieved, with successful scale-upon a prototype custom-built 70 ft x 1 ft R2R platform moving at 25 mu m/s, with 9 consecutive CZA units. Static thermal annealing of identical films in a conventional vacuum oven fails to produce comparable results. As a potential for applications, we fabricate high-density silicon oxide nanodot arrays from the CZA-S annealed BCP thin film template.
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