期刊
ACS NANO
卷 7, 期 7, 页码 6219-6224出版社
AMER CHEMICAL SOC
DOI: 10.1021/nn4021746
关键词
graphene nanoribbons; graphene fluoride; thermochemical nanolithography; atomic force microscopy
类别
资金
- DARPA Tip-Based Nanofabrication (TBN) program
- NRL Nano-science Institute
- USNA Trident scholarship program
- Div Of Civil, Mechanical, & Manufact Inn
- Directorate For Engineering [1100290] Funding Source: National Science Foundation
Graphene nanoribbons (GNRs) would be the ideal building blocks for all carbon electronics; however, many challenges remain in developing an appropriate nanolithography that generates high-quality ribbons in registry with other devices. Here we report direct and local fabrication of GNRs by thermochemical nanolithography, which uses a heated AFM probe to locally convert highly insulating graphene fluoride to conductive graphene. Chemically isolated GNRs as narrow as 40 nm show p-doping behavior and sheet resistances as low as 22.9 K Omega/square in air, only approximately 10x higher than that of pristine graphene. The impact of probe temperature and speed are examined as well as the variable-temperature transport properties of the GNR.
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