期刊
ACS NANO
卷 7, 期 5, 页码 4441-4448出版社
AMER CHEMICAL SOC
DOI: 10.1021/nn401037c
关键词
epitaxial graphene; membranes; photo-assisted etching; Raman spectroscopy; transmission electron microscopy
类别
资金
- Cluster of Excellence Engineering of Advanced Materials
- European Research Council (ERC) [246622-GRAPHENOCHEM]
- [SFB 953]
We present a fabrication process for freely suspended membranes consisting of bi- and trilayer graphene grown on silicon carbide. The procedure, involving photoelectrochemical etching, enables the simultaneous fabrication of hundreds of arbitrarily shaped membranes with an area up to 500 mu m(2) and a yield or around 90%. Micro-Raman and atomic force microscopy measurements confirm that the graphene layer withstands the electrochemical etching and show that the membranes are virtually unstrained. The process delivers membranes with a cleanliness suited for high-resolution transmission electron microscopy (HRTEM) at atomic scale. The membrane, and its frame, is very robust with respect to thermal cycling above 1000 C as well as harsh acidic or alkaline treatment.
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