期刊
ACS NANO
卷 6, 期 11, 页码 10335-10342出版社
AMER CHEMICAL SOC
DOI: 10.1021/nn304266f
关键词
block copolymer; zone annealing; unidirectional nanostructures; thermal expansion induced shear; flexible substrate; PDMS template; hierarchical patterning
类别
资金
- National Science Foundation (NSF), Division of Materials Research (DMR) [NSF DMR-1006421]
- U.S:-Department of Energy, Office of Basic Energy Sciences [DE-AC02-98CH10886]
- Direct For Mathematical & Physical Scien
- Division Of Materials Research [1006449] Funding Source: National Science Foundation
- Division Of Materials Research
- Direct For Mathematical & Physical Scien [1006421] Funding Source: National Science Foundation
As demand for smaller, more powerful, and energy- efficient devices continues, conventional patterning technologies are pushing up against fundamental limits. Block copolymers (BCPs) are considered prime candidates for a potential solution via directed self-assembly of nanostructures. We Introduce here a facile directed self-assembly method to rapidly fabricate unidirectionally aligned BCP nanopattems at large scale, on rigid or flexible template-free substrates via a thermally induced dynamic gradient soft-shear field. A localized differential thermal expansion at the interface between a BCP film and a confining polydimethylsiloxane (PDMS) layer due to a dynamic thermal field imposes the gradient soft-shear field. PDMS undergoes directional expansion (along the annealing direction) in the heating zone and contracts back in the cooling zone, thus setting up a single cycle of oscillatory shear (maximum lateral shear stress similar to 12 x 10(4) Pa) in the system. We successfully apply this process to create unidirectional alignment of BCP thin films over a wide range of thicknesses (nm to mu m) and processing speeds (mu m/s to mm/s) using both a flat and patterned PDMS layer. Grazing incidence small-angle X-ray-scattering measurements show absolutely no sign of isotropic population and reveal >= 99% aligned orientational order with an angular spread Delta theta(twhm) <= 5 degrees (full width at half-maximum). This method may pave the way to practical industrial use of hierarchically patterned BCP nanostructures.
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