期刊
ACS NANO
卷 4, 期 9, 页码 5225-5232出版社
AMER CHEMICAL SOC
DOI: 10.1021/nn101453v
关键词
perovskite nanosheets; layer-by-layer assembly; high-kappa dielectrics; size effect
类别
资金
- World Premier International Research Center, MEXT, Japan
- Industrial Technology Research Grant [06A22702d]
- NEDO
- MEXT, Japan [208591]
Size-induced suppression of permittivity in perovskite thin films is a fundamental problem that has remained unresolved for decades. This size-effect issue becomes increasingly important due to the integration of perovskite nanofilms into high-kappa capacitors, as well as concerns that intrinsic size effects may limit their device performance. Here, we report a new approach to produce robust high-kappa nanodielectrics using perovskite nanosheet (Ca2Nb3O10), a new class of nanomaterials that is derived from layered compounds by exfoliation. By a solution-based bottom-up approach using perovskite nanosheets, we have successfully fabricated multilayer nanofilms directly on SrRuO3 or Pt substrates without any interfacial dead layers. These nanofilms exhibit high dielectric constant (>200), the largest value seen so far in perovskite films with a thickness down to 10 nm. Furthermore, the superior high-kappa properties are a size-effect-free characteristic with low leakage current density (<10(-7) A cm(-2)). Our work provides a key for understanding the size effect and also represents a step toward a bottom-up paradigm for future high-kappa devices.
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