4.8 Article

Multiple Nanoscale Templates by Orthogonal Degradation of a Supramolecular Block Copolymer Lithographic System

期刊

ACS NANO
卷 4, 期 1, 页码 285-291

出版社

AMER CHEMICAL SOC
DOI: 10.1021/nn901330q

关键词

block copolymer lithography; templates; supramolecular assembly; thin films

资金

  1. Nanoelectronics Research Initiative [RID 1549]
  2. Microelectronics Advanced Research Corporation (MARCO)
  3. Focus Center Research Program (FCRP)-Center for Functional Engineered NanoArchitectonics (FENA)
  4. UCSB Materials Research Laboratory [DMR05-20415]

向作者/读者索取更多资源

An orthogonal approach to the creation of multiple nanoscale templates from a single supramolecular block copolymer system is presented. The enabling feature of this strategy is the design of block copolymers that incorporate independent degradation chemistries which permits each block copolymer to be addressed individually and sequentially. By blending a block copolymer containing H-bond donor groups and a UV-degradable domain with the complementary copolymer containing H-bond acceptor groups and an acid-cleavable segment, diverse and tunable nanoporous thin films with different pore sizes and array patterns can be obtained. This robust strategy demonstrates the potential of combining orthogonal chemistry with the inherent tunability of supramolecular systems,

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