期刊
ACS APPLIED MATERIALS & INTERFACES
卷 6, 期 4, 页码 2786-2790出版社
AMER CHEMICAL SOC
DOI: 10.1021/am405323c
关键词
digital micromirror device; nanoparticle ink; nanoparticle laser sintering; nonvacuum environment; low temperature metal thin film patterning
资金
- National Research Foundation of Korea (NRF) [2012-0008779]
- Global Frontier R&D Program on Center for Multiscale Energy System [2012-054172]
- Ministry of Science, ICT Future
- R&D Convergence Program
- ISTK (Korea Research Council for Industrial Science and Technology) [B551179-10-01-00]
- Seoul National University, Institute of Advanced Machinery and Design (SNU-IAMD)
- National Research Council of Science & Technology (NST), Republic of Korea [CAP-10-1-KIMM] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [2011-0031561] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
We demonstrate selective laser sintering of silver (Ag) nanoparticle (NP) ink using a digital micromirror device (DMD) for the facile fabrication of 2D electrode pattern without any conventional lithographic means or scanning procedure. An arbitrary 2D pattern at the lateral size of 25 mu m X 25 mu m with 160 nm height is readily produced on a glass substrate by a short exposure of 532 nm Nd:YAG continuous wave laser. The resultant metal pattern exhibits low electrical resistivity of 10.8 u Omega.cm and also shows a fine edge sharpness by the virtue of low thermal conductivity of Ag NP ink. Furthermore, 10 X 10 star-shaped micropattern arrays are fabricated through a step-and-repeat scheme to ensure the potential of this process for the large-area metal pattern fabrication.
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