期刊
ACS APPLIED MATERIALS & INTERFACES
卷 5, 期 13, 页码 6438-6442出版社
AMER CHEMICAL SOC
DOI: 10.1021/am402166d
关键词
nanowrinkles; polymers; nanotexturing; polystyrene; reactive ion etching
资金
- National Science Foundation (NSF) [CMMI-1069180]
- Office of Naval Research [N00014-13-1-0172]
- Department of Defense, Air Force Office of Scientific Research, National Defense Science and Engineering Graduate Fellowship [32 CFR 168a]
- Ryan Fellowship
- Northwestern University International Institute for Nanotechnology
- Graduate School at Northwestern University
- NSF-MRSEC
- NSF-NSC
- Keck Foundation
- Materials, Processing and Microfabrication Facility
- MRSEC program of the NSF [DMR-1121262]
- [FA9550-05-C-0059]
- [FA9550-11-C-0028]
- Div Of Civil, Mechanical, & Manufact Inn
- Directorate For Engineering [1069180] Funding Source: National Science Foundation
This paper describes a parallel method to generate polymer nanowrinkles over large areas with wavelengths that were continuously tuned down to 30 nm. Reactive ion etching using fluorinated gases was used to chemically treat thermoplastic polystyrene films, which resulted in a stiff skin layer. Upon heating, the treated thermoplastic, microscale, and nanoscale wrinkles were formed. We used variable-angle spectroscopic ellipsometry to characterize the thickness of the skin layer; this thickness could then be used to predict and control the nanowrinkle wavelength. Because the properties of these nanotextured polymer surfaces can be tuned over a large range of wrinkle wavelengths, they are promising for a broad range of applications, especially those that require large-area and uniform surface patterning.
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