期刊
IEEE-ASME TRANSACTIONS ON MECHATRONICS
卷 20, 期 5, 页码 2031-2038出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMECH.2014.2361271
关键词
Automation; nanotechnology; robot sensing systems; robot vision systems
类别
资金
- German Research Foundation (DFG) [GZ: FA 347/39-1]
Automated manipulation of micro- and nanosized objects using robotic setups constitutes a major challenge due to the force-scaling laws and the limited control possibilities on that scale. This paper presents a new developed approach for automated manipulation of individual colloidal particles using a dedicated dualprobe setup inside a scanning electron microscope. Based on tailored probe geometries, the setup allows for reliable pick-up and release sequences of individual particles. Applying image processing of the visual feedback provided by the microscope enables for direct and fast control of the complex manipulation routines and thus allows for fully automated alignment sequences. Experimental results reveal a high repeatability of the process with hitherto unrivaled precision. The advantages and limits of this technique are highlighted with respect to further application scenarios.
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