期刊
OPTICA
卷 5, 期 1, 页码 44-51出版社
OPTICAL SOC AMER
DOI: 10.1364/OPTICA.5.000044
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资金
- National Science Foundation (NSF) [1453218, 1506605]
- U.S. Department of Energy (DOE) [DE-SC0001088]
- Direct For Mathematical & Physical Scien [1506605] Funding Source: National Science Foundation
Mechanically flexible photonic devices are essential building blocks for novel bio-integrated optoelectronic systems, wearable sensors, and flexible consumer electronics. Here we describe the design and experimental demonstration of high-performance flexible semiconductor nanomembrane photodetectors integrated with single-mode chalcogenide glass waveguides. Through a combination of a waveguide-integrated architecture to enhance light-matter interactions and mechanical engineering of multilayer configurations to suppress strains, the detector devices exhibit record optical and mechanical performance. The devices feature a noise equivalent power as low as 0.02 pW.Hz(1/2), a linear dynamic range exceeding 70 dB, and a 3-dB bandwidth of 1.4 GHz, all measured at 1530 nm wavelength. The devices withstand 1000 bending cycles at a submillimeter radius without degradation in their optoelectronic responses. These metrics represent significant improvements over state-of-the-art flexible photodetectors. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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