期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
卷 29, 期 5, 页码 -出版社
A V S AMER INST PHYSICS
DOI: 10.1116/1.3628640
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资金
- Agent-schapNL through the EXEPT and ACHieVE programs
- Foundation for Fundamental Research on Matter (Stichting voor Fundamenteel Onderzoek der Materie, FOM)
- Carl Zeiss SMT GmbH through the Industrial Partnership Program XMO
Mo/Si multilayer mirrors with nanoscale bilayer thicknesses have been deposited on stepped substrate topographies, using various deposition angles. The multilayer morphology at the step-edge region was studied by cross section transmission electron microscopy. A transition from a continuous- to columnar layer morphology is observed near the step-edge, as a function of the local angle of incidence of the deposition flux. Taking into account the corresponding kinetics and anisotropy in layer growth, a continuum model has been developed to give a detailed description of the height profiles of the individual continuous layers. Complementary optical characterization of the multilayer system using a microscope operating in the extreme ultraviolet wavelength range, revealed that the influence of the step-edge on the planar multilayer structure is restricted to a region within 300 nm from the step-edge. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3628640]
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